inLux™

SEM Raman Interface

Introducing the inLux™ SEM Raman Interface – a universal solution for in-situ SEM Raman analysis that revolutionizes the way you combine chemical and morphological imaging. This innovative interface integrates high-quality Raman spectroscopy directly into your scanning electron microscope (SEM) chamber, allowing you to seamlessly collect Raman spectra and generate detailed 2D and 3D images while simultaneously performing SEM imaging.

By keeping the sample static during the switch between SEM imaging and Raman data collection, the inLux™ interface ensures precise co-location of Raman and SEM images. This guarantees that every detail is captured accurately, making it an essential tool for researchers who demand high precision in material characterization.

Key Features and Benefits:

  • Comprehensive Raman Capabilities:

Collect spectra from single points, multiple points, or generate full 2D and 3D confocal Raman images. Analyze volumes larger than 0.5 mm in each axis with ease.

  • High Precision Positioning:

With fully encoded position control down to 50 nm, the inLux™ interface assures highly accurate Raman imaging, providing reliable data for even the most challenging samples.

  • Multi-Modal Analysis:

Perform Raman, photoluminescence (PL), and spectral cathodoluminescence (CL) analysis simultaneously. This information-rich approach enhances your understanding of sample properties and heterogeneity.

  • Universal Compatibility:

Designed to be mounted on a wide range of SEMs from various manufacturers like JEOL, the inLux™ interface adapts to different chamber sizes without requiring any modifications to your existing SEM system.

Renishaw inLux x JEOL

  • Non-Invasive and User-Friendly:

The inLux probe can be fully retracted with a single click, ensuring it does not interfere with other SEM functions or workflows when not in use.

  • Configurable and Automated:

Customize your analysis with support for up to two different excitation laser wavelengths plus an optional CL module. Enjoy the convenience of one-click laser switching for streamlined analysis of challenging samples.

  • Enhanced Sample Visualization:

Benefit from large area optical imaging and montage capabilities that help you visualize your sample comprehensively and target areas of interest with precision.

The inLux™ SEM Raman Interface is the ideal solution for laboratories seeking to push the boundaries of SEM-based chemical analysis. Its integration of Raman spectroscopy into the SEM environment not only enhances data quality but also streamlines workflows, enabling faster, more precise material characterization.

For further information and detailed specifications, please visit the official inLux™ SEM Raman Interface product page on the Renishaw website.

Skip to content